Excimer laser ablation lithography applied to the fabrication of reflective diffractive optics

M Flury, A Benatmane, P Gerard, PC Montgomery… - Applied Surface …, 2003 - Elsevier
We propose a low cost technique for the production of diffractive optical elements (DOE).
These elements are devoted to high power lasers beam shaping in the mid-infrared …

Excimer laser fabrication of low-cost diffractive optical prototypes for CO2 laser marking applications

M Flury, JG Fontaine, P Gerard… - Computer-Controlled …, 1999 - spiedigitallibrary.org
We present a novel use of micro-machining with excimer laser: realization of reflective
diffractive optical elements (DOE) for laser marking. The DOE's design is first calculated …

Rapid fabrication of diffractive micro-lenses using excimer laser ablation

X Wang, JR Leger, RH Rediker - Diffractive Optics and Micro-Optics, 1996 - opg.optica.org
Diffractive optical elements (DOEs) provide solutions for applications that require complex
phase profiles which are difficult or impossible to make with conventional optics. Because of …

Excimer laser patterned dielectric masks for the fabrication of diffractive optical elements by laser ablation

D Schäfer, J Ihlemann, K Mann, G Marowsky - Applied Physics A, 1999 - Springer
Masks for laser processing are generated by laser ablation patterning of dielectric layer
systems. The application of these masks for the rapid fabrication of diffractive optical …

Laser direct writing: Recent developments for the making of diffractive optics

M Häfner, C Pruss, W Osten - Optik & Photonik, 2011 - Wiley Online Library
Diffractive optics are compact and flexible optical elements with attractive properties that
conventional refractive or reflective surfaces cannot deliver. While their fabrication is still …

Diffractive optical elements for the infrared

H Haidner - 16th Congress of the International Commission for …, 1993 - spiedigitallibrary.org
Diffractive optical elements (DOEs) tend to become severe competitors to conventional
refractive optical elements, especially for monochromatic applications as in optical …

Fabrication of diffractive optical elements with arbitrary surface-relief profile by direct laser writing

C Wang, YC Chan, YL Lam - Optical Engineering, 2002 - spiedigitallibrary.org
A new method is developed to precisely control the key parameters for fabricating high
quality diffractive optical elements with any surface-relief profiles. For the case of direct laser …

Diffractive optical elements fabricated by laser direct writing and other techniques

P Langlois, H Jerominek, L Leclerc… - Miniature and Micro …, 1993 - spiedigitallibrary.org
Four different thin DOE pattern generation techniques used at National Optics Institute (NOI)
are discussed and compared: laser direct writing in photoresist, microlithography with e …

Generation of large-diameter diffractive elements with laser pattern generation

JP Bowen, RL Michaels, CG Blough - Applied optics, 1997 - opg.optica.org
We describe the design and construction of a high-precision laser writing machine for the
direct generation of large-diameter rotationally symmetric diffractive optics with continuous …

Excimer laser beam shaping and material processing using diffractive optics

SW Williams, PJ Marsden, NC Roberts… - High-Power Laser …, 1998 - spiedigitallibrary.org
Diffractive optical systems have been developed to allow high efficiency material processing
using excimer lasers. These systems allow beam homogenizing and shaping for surface …