This chapter discusses techniques by which parts–or features on parts–are fabricated by
removal of material. In general, the energy of the laser beam is absorbed in a thin layer or …

Excimer laser ablation provides the micromachining engineer with a unique tool for
patterning, cutting, and structuring a wide variety of materials, including ceramics, glasses …

The machining of several materials such as polymers, metals and ceramics using excimer
lasers (193, 248 and 308 nm) was investigated. By photoablation, micrometer resolution can …

The increasing demand for highly developed ceramic materials for various applications calls
for innovative machining technologies yielding high accuracy and efficiency. Associated …

Although material ablation by pulsed light sources has been studied since the invention of
the laser [1, 2], reports in 1982 of polymers etched by UV excimer lasers [3, 4] stimulated …

The UV-photoablation behaviour of glasses and oxide ceramics has been investigated.
These materials exhibit a rather low UV-absorptivity compared to many polymers or metals …

Bei der Herstellung oberflächenbeanspruchter Bauteile sind bis heute die letzten
Bearbeitungsschritte mechanischer Natur. Meist reichen Verfahren, wie Schleifen und …

A 2 J/20 Hz XeCl (308 nm) excimer laser with a flat intensity distribution is used for
processing Al2O3, Si3N4, SiC and AlN ceramics and short glass fiber reinforced polymers …

Laser micromachining is now a common method of surface modification and machining;
utilizing a broad spectrum of wavelengths, wave forms, and pulse durations. The most …

Laser machining is increasingly appearing as an alternative for micromachining of ceramics.
Using ceramic materials using excimer lasers can result in smooth surfaces or in the …