Scanning probe system with spring probe and actuation/sensing structure

T Hantschel, EM Chow, DK Fork, MA Rosa… - US Patent …, 2004 - Google Patents
Scanning probe microscopy (SPM; also known as atomic force microscopy (AFM) is
considered a spin-off of Scan ning tunneling microscopy (STM). An SPM system mea Sures …
被引用次数：62 相关文章

Scanning probe system with spring probe and actuation/sensing structure

T Hantschel, E Chow, D Fork, M Rosa… - US Patent App. 10 …, 2003 - Google Patents
Scanning probe systems, which include scanning probe microscopes (SPMS) are disclosed
that include cantilevered spring (eg, stressy metal) probes and actuation/position sensing …

Scanning probe system with spring probe and actuation/sensing structure

T Hantschel, EM Chow, DK Fork, MA Rosa… - US Patent …, 2004 - freepatentsonline.com
Scanning probe systems, which include scanning probe microscopes (SPMs) are disclosed
that include cantilevered spring (eg, stressy metal) probes and actuation/position sensing …

Scanning probe system with spring probe and actuation/sensing structure

T Hantschel, EM Chow, DK Fork… - US Patent App. 10 …, 2003 - freepatentsonline.com
Scanning probe systems, which include scanning probe microscopes (SPMS) are disclosed
that include cantilevered spring (eg, stressy metal) probes and actuation/position sensing …