Laser micromachining and patterning by laser ablation is used for the fabrication of micro-
fluidic and micro-optic components. Irradiation configurations comprise direct spot writing …

Recent developments in using high-quality laser beam for micro-machining has opened up
areas of applications that were unthinkable of only a few years ago. This paper reports on …

Microfluidics falls into an intermediate range within the spectrum of applications for
microfabrication techniques. The width and depth of most microfluidic channels fall in the …

We describe a number of microfluidic components that have been formed by laer
micromachining and incorporated in a picoliter droplet dispenser. The laser micromachined …

Optical technologies have proven their versatility to manufacture microfluidic devices. Laser-
based techniques have recently appeared, capable of overcoming the complexity and waste …

New techniques for 3D micromachining by direct laser ablation of materials using excimer
lasers have been developed. Basic to all of these techniques is the use of image projection …

Miniaturization and high precision are rapidly becoming a requirement for many industrial
processes and products. As a result, there is greater interest in the use of laser …

Laser micromachining by ablation is an established technique for the production of 2.5 D
and 3D features in a wide variety of materials. Mask projection techniques using excimer …

Excimer laser ablation is used in conjunction with mask projection techniques to produce
novel and complex microstructures. Special multiple-mask techniques have been developed …

The use of pulsed lasers for microprocessing material in several manufacturing industries is
presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film …