Single etch grating couplers for mass fabrication with DUV lithography
Surface grating couplers enable efficient coupling of light between optical fibers and planar
waveguide circuits. While traditional grating designs require two etch steps for efficient …
waveguide circuits. While traditional grating designs require two etch steps for efficient …
Single etch grating couplers for mass fabrication with DUV lithography
R Halir, L Zavargo-Peche, DX Xu, P Cheben… - Optical and Quantum …, 2012 - infona.pl
Surface grating couplers enable efficient coupling of light between optical fibers and planar
waveguide circuits. While traditional grating designs require two etch steps for efficient …
waveguide circuits. While traditional grating designs require two etch steps for efficient …
[引用][C] Single etch grating couplers for mass fabrication with DUV lithography
R Halir, L Zavargo-Peche, DX Xu, P Cheben… - Optical and Quantum …, 2012 - cir.nii.ac.jp
Single etch grating couplers for mass fabrication with DUV lithography.
R Halir, L Zavargo-Peche, DX Xu… - Optical & Quantum …, 2012 - search.ebscohost.com
Surface grating couplers enable efficient coupling of light between optical fibers and planar
waveguide circuits. While traditional grating designs require two etch steps for efficient …
waveguide circuits. While traditional grating designs require two etch steps for efficient …