Direct laser ablative microfabrication methods are exploited in the development of polymer
photonic structures. A dedicated experimental microfabrication facility using ArF excimer …

Masks for laser processing are generated by laser ablation patterning of dielectric layer
systems. The application of these masks for the rapid fabrication of diffractive optical …

Excimer laser ablation is a microfabrication technique suitable for surface structuring of
polymers because of their high UV absorption an often non-thermal ablation behavior. Due …

In this paper the current state of the art and new trends in excimer laser processing of
polymer materials are presented. Two processing regimes are of general interest: below and …

Excimer laser ablation was used for direct writing of multimode waveguide structures with
passive fiber alignment grooves in polymers. First, integrated optical multimode components …

The role of optics in micro systems is continuously growing. Future systems will use
electrical and optical data paths in parallel for a higher performance. Two dimensional …

Laser ablation is a versatile technique for fabricating microstructures on polymer surfaces.
Due to the nature of the process, the fabrication of the microstruture can take place in a very …

Excimer laser ablation is a valuable microfabrication technology, which is particularly well-
suited for surface structuring of polymers because of their excellent UV absorption properties …

Excimer laser ablation of polymers is demonstrated to be a well suited technology for cost
effective fabrication of prototypes of polymer microstructures in relatively short times …

An increase in interconnection density, a reduction in packaging sizes and the quest for
lowcost product development strategy are some of the key challenges facing micro …