We present in this work and for the first time a high level of integration of piezoelectric nano-
cantilevers on a silicon substrate (4 inches in diameter). We use lead titanate–zirconate …

Piezoresponse force microscopy has been employed to monitor the effects of surface
contamination and tip-sample contact on the piezoelectric coefficients of PZT thin films …

In this paper, we showed the realization and the characterization of a PZT-actuated micro-
cantilever. The measurement and the modeling of its resonant frequency allow deducing the …

Based on a 4 μm thick PZT films with (100) orientation, piezoelectric microcantilevers without
a substrate support (free-stand) were fabricated with a typical micromachining process …

In recent years, piezoelectric microelectromechanical systems (MEMS) have attracted
attention as next-generation functional microdevices. Micropumps for inkjet heads are one of …

This Letter focuses on the piezoelectric microcantilever probe fabrication processes. The
sensing layer was lead zirconate titanate (PZT) thin films, prepared by sol–gel process, and …

Piezoelectric materials are of great interest for new MEMS devices for sensors, actuators
and energy harvesting. Due to its large electromechanical coupling coefficient Lead …

We propose in this paper the characterization of a new generation of piezoelectric
cantilevers called thick-films piezoelectric actuators. Based on the bonding and thinning …

In this thesis, the integration of lead zirconate titanate Pb (Zr, Ti) O3 (PZT) thin films into
piezoelectric microelectromechanical systems (MEMS) based on silicon is studied. In these …

We establish that clamping effects, which limit accurate determination of piezoelectric
responses in bulk materials and films using piezoelectric force microscopy (PFM), are not …