Role of ammonia in depositing silicon nanoparticles by remote plasma enhanced chemical vapor deposition

A Rodríguez, J Arenas, AL Pérez-Martínez, JC Alonso - Materials Letters, 2014 - Elsevier
The optimal development of silicon photonics could improve the current state of
microelectronics technology. However due to the multiple parameters involved in the …
被引用次数：8 相关文章

Role of ammonia in depositing silicon nanoparticles by remote plasma enhanced chemical vapor deposition

A Rodríguez, J Arenas, AL Pérez-Martínez, JC Alonso - Materials Letters, 2014 - infona.pl
The optimal development of silicon photonics could improve the current state of
microelectronics technology. However due to the multiple parameters involved in the …

Role of ammonia in depositing silicon nanoparticles by remote plasma enhanced chemical vapor deposition

A Rodríguez, J Arenas, AL Pérez-Martínez… - Materials …, 2014 - ui.adsabs.harvard.edu
The optimal development of silicon photonics could improve the current state of
microelectronics technology. However due to the multiple parameters involved in the …