Effect of sintering germanium epilayers on dislocation dynamics: From theory to experimental observation

YA Bioud, M Rondeau, A Boucherif, G Patriarche… - Acta Materialia, 2020 - Elsevier
High-quality germanium epilayers on Si with low threading-dislocation density were
achieved by sintering of porous Ge/Si films. The process consists in the formation of porous …

Ultra-Low Dislocation Ge on Silicon Virtual Substrate: New Insights from Crystal Plasticity Simulations

MH Hamza, YA Bioud, A Boucherif, R Arès… - Available at SSRN …, 2022 - papers.ssrn.com
Abstract By sintering porous Si/Ge films, researchers were able to create high-quality
germanium (Ge) epilayers on silicon (Si) with low threading dislocation density. The …

Voided Ge/Si Platform to Integrate III-V Materials on Si

YA Bioud, A Boucherif, M Myronov… - ECS …, 2019 - iopscience.iop.org
High-quality germanium epilayers on Si with low threadingdislocation densities are
achieved by self-assembling nanovoids inside the Ge layer. This consists on the formation of …

Low cost Ge/Si virtual substrate through dislocation trapping by nanovoids

YA Bioud, A Boucherif, E Paradis, A Soltani… - arXiv preprint arXiv …, 2018 - arxiv.org
A low-cost method to reduce the threading disloca-tions density (TDD) in relaxed
germanium (Ge) epilayers grown on silicon (Si) substrates is presented. Ge/Si sub-strate …

[HTML][HTML] Atomic-scale insights on the formation of ordered arrays of edge dislocations in Ge/Si (001) films via molecular dynamics simulations

L Barbisan, A Marzegalli, F Montalenti - Scientific Reports, 2022 - nature.com
Heteroepitaxial films of Ge on Si (001) are receiving wide attention due to several possible
applications in micro-and opto-electronics. Understanding the dynamic behavior of linear …

Misfit dislocation gettering by substrate pit-patterning in SiGe films on Si (001)

M Grydlik, F Boioli, H Groiss, R Gatti, M Brehm… - Applied Physics …, 2012 - pubs.aip.org
We show that suitable pit-patterning of a Si (001) substrate can strongly influence the
nucleation and the propagation of dislocations during epitaxial deposition of Si-rich Si 1-x …

Dynamic formation of spherical voids crossing linear defects

YA Bioud, M Rondeau, A Boucherif… - arXiv preprint arXiv …, 2021 - arxiv.org
A predictive model for the evolution of porous Ge layer upon thermal treatment is reported.
We represent an idealized etched dislocation core as an axially symmetric elongated hole …

Fabrication of penetrating pores in epitaxial Ge-on-Si through preferential etching along threading dislocations

Y Zhu, Y Zhang, B Li, GM Xia, RT Wen - Electrochimica Acta, 2024 - Elsevier
Abstract Epitaxial Ge-on-Si possesses a high density of threading dislocations (TDs) due to
the lattice mismatch and difference in thermal expansion coefficient. By employing the lattice …

Removal of stacking faults in Ge grown on Si through nanoscale openings in chemical SiO2

D Leonhardt, J Sheng, JG Cederberg, MS Carroll, Q Li… - Thin solid films, 2011 - Elsevier
Nucleation and eventual coalescence of Ge islands, grown out of 5 to 7nm diameter
openings in chemical SiO2 template and epitaxially registered to the underlying Si substrate …

[PDF][PDF] Unexpected dominance of vertical dislocations in high-misfit Ge/Si (001) films and their elimination by deep substrate patterning

A Marzegalli, F Isa, H Groiss, E Müller, CV Falub… - Adv. Mater, 2013 - academia.edu
Due to their compatibility with standard Si CMOS technology, Ge (or SiGe) heterostructures
on Si (001) play an important role in modern information and communications technology …