OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

C Durfee, A Greene, J Frougier… - … Process Control for …, 2021 - spiedigitallibrary.org
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …
被引用次数：14 相关文章

OCD enhanced: Implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam… - SPIE Advanced …, 2021 - research.ibm.com
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …

OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam… - Proc. of SPIE …, 2021 - spiedigitallibrary.org
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …

OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam… - … Process Control for …, 2021 - ui.adsabs.harvard.edu
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …
[PDF] novami.com

[PDF][PDF] OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam… - Proc. of SPIE …, 2021 - novami.com
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …
[PDF] qellim.com

[PDF][PDF] OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam, M Medikonda… - Proc. of SPIE …, 2021 - qellim.com
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …
[PDF] qellim.com

[PDF][PDF] OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam… - Proc. of SPIE …, 2021 - m.qellim.com
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …
[PDF] novami.com

[PDF][PDF] OCD enhanced: implementation and validation of spectral interferometry for nanosheet inner spacer indentation

D Schmidt, C Durfee, S Pancharatnam… - Proc. of SPIE …, 2021 - novami.com
In this work, the novel enhancement to multichannel scatterometry data collection, Spectral
Interferometry, is introduced and discussed. The Spectral Interferometry technology adds …