MeV-Fe ions implantation of GaAs–Induced morphological and structural modification of porous GaAs

W AL-Khoury, M Naddaf, M Ahmad - … in Physics Research Section B: Beam …, 2021 - Elsevier
Porous GaAs were formed by electrochemical etching of n-type GaAs (1 0 0) substrates
implanted by iron ion beam with energy of 2 MeV at low ion fluence of 7.8× 10+ 13 Fe++/cm …

Optical properties of porous GaAs formed by low energy ion implantation

A Hernández, Y Kudriavtsev, C Salinas-Fuentes… - Vacuum, 2020 - Elsevier
We report about chemical, structural and optical characteristics of porous GaAs near-surface
layers formed by low energy and high fluence ion implantation of Si+ and Ge+ ions. The …

Re-crystallization of Mn implanted GaAs by He+ ion irradiation

CH Chen, H Niu, CY Cheng, HH Hsieh… - Nuclear Instruments and …, 2008 - Elsevier
Mn ions were implanted into p-GaAs: Zn substrates at room temperature. Post-annealing
was performed using 350keV He+ ion irradiation at a temperature of 150–250° C. The …

Porous germanium formed by low energy high dose Ag+-ion implantation

AL Stepanov, VI Nuzhdin, VF Valeev, AM Rogov… - Vacuum, 2018 - Elsevier
A technical approach is proposed for the synthesis of thin porous PGe layers with Ag
nanoparticles based on low-energy high-dose implantation of single-crystal c-Ge metal ions …

Investigations of chemical and atomic composition of native oxide layers covering SI GaAs implanted with Xe ions

PL Tuan, M Kulik, J Nowicka-Scheibe, J Żuk… - Surface and Coatings …, 2020 - Elsevier
Abstract Semi-insulating (100) oriented GaAs was irradiated with 250 keV Xe+ ions with
different fluences. The native oxide layers formed in the air after implantation are …

Formation of porous Ga2O3/GaAs layers for electronic devices

Y Suchikova, A Lazarenko, S Kovachov… - 2022 IEEE 16th …, 2022 - ieeexplore.ieee.org
The article presents a simple and cheap method to form a porous structure of Ga 2 O 3/GaAs
on the surface of monocrystalline gallium arsenide. It is shown that two-stage etching in the …

Structural and optical properties of electrochemically etched p+-type GaAs surfaces: influence of HF presence in the etching electrolyte

M Naddaf - Journal of Materials Science: Materials in Electronics, 2017 - Springer
Porous GaAs layers have been prepared by electrochemical etching of p+-type GaAs (10 0)
surfaces in two different solutions; HCl: H 2 O 2: H 2 O (HF free electrolyte) and HCl: H 2 O 2 …

Oxide layers on implanted GaAs surfaces: X-ray photoelectron spectroscopy and ellipsometry study

M Kulik, SO Saied, J Liśkiewicz - Nukleonika, 1999 - infona.pl
The chemical composition of an oxide on the GaAs surface implanted with Xe and Ar ions at
various doses was studied by x-ray-photoelectron spectroscopy (XPS). It was found that only …

Modification of the physical and chemical properties of GaAs/Ge surface epitaxy films by ion implantation

DA Tashmukhamedova, BE Umirzakov - Surface and Coatings Technology, 2002 - Elsevier
The influence of Ar+ and Ba+ ion implantation on the composition and structure of GaAs
films is considered in this work. Information about the density distribution of the electronic …

Chemical composition of nanoporous layer formed by electrochemical etching of p-Type GaAs

YA Bioud, A Boucherif, A Belarouci, E Paradis… - Nanoscale research …, 2016 - Springer
We have performed a detailed characterization study of electrochemically etched p-type
GaAs in a hydrofluoric acid-based electrolyte. The samples were investigated and …