Review of nanosheet metrology opportunities for technology readiness

MA Breton, D Schmidt, A Greene… - Journal of Micro …, 2022 - spiedigitallibrary.org
Over the past several years, stacked nanosheet gate-all-around (GAA) transistors captured
the focus of the semiconductor industry and have been identified as the lead architecture to …

Review of nanosheet metrology opportunities for technology readiness

MA Breton, D Schmidt, A Greene, J Frougier, N Felix - spiedigitallibrary.org
Over the past several years, stacked nanosheet gate-all-around (GAA) transistors captured
the focus of the semiconductor industry and have been identified as the lead architecture to …

Review of nanosheet metrology opportunities for technology readiness

MA Breton, D Schmidt, A Greene… - Journal of Micro …, 2022 - research.ibm.com
Over the past several years, stacked nanosheet gate-all-around (GAA) transistors captured
the focus of the semiconductor industry and have been identified as the lead architecture to …

[PDF][PDF] Review of nanosheet metrology opportunities for technology readiness

MA Breton, D Schmidt, A Greene, J Frougier, N Felix - scholar.archive.org
Over the past several years, stacked nanosheet gate-all-around (GAA) transistors captured
the focus of the semiconductor industry and have been identified as the lead architecture to …