Demonstration of a nanosheet FET with high thermal conductivity material as buried oxide: Mitigation of self-heating effect

S Rathore, RK Jaisawal, PN Kondekar… - IEEE Transactions on …, 2023 - ieeexplore.ieee.org
Self-heating-induced thermal degradation is a severe issue in nonplanar MOS architectures.
Especially in stacked gate-all-around (GAA) nanosheet FET (NSFET), the self-heating effect …
被引用次数：19 相关文章

[引用][C] Demonstration of a Nanosheet FET With High Thermal Conductivity Material as Buried Oxide: Mitigation of Self-Heating Effect

S Rathore, RK Jaisawal… - IEEE Transactions on …, 2023 - ui.adsabs.harvard.edu
Demonstration of a Nanosheet FET With High Thermal Conductivity Material as Buried Oxide:
Mitigation of Self-Heating Effect - NASA/ADS Now on home page ads icon ads Enable full ADS …