Stacked edge couplers in the back-end-of-line stack of a photonic chip
Y Bian - US Patent 11,947,168, 2024 - Google Patents
A stacked edge coupler for a photonic chip is provided. The stacked edge coupler includes
an insulating layer, a waveguide core, a first assisting waveguide, and a back-end-of-line …
an insulating layer, a waveguide core, a first assisting waveguide, and a back-end-of-line …
Edge couplers including a grooved membrane
T Barwicz, RK Leidy, T Houghton - US Patent 11,860,414, 2024 - Google Patents
Structures including an edge coupler and methods of fabricating a structure including an
edge coupler. The structure includes a waveguide core region on a first dielectric layer, and …
edge coupler. The structure includes a waveguide core region on a first dielectric layer, and …