The development of micromachined gyroscope structure and circuitry technology

D Xia, C Yu, L Kong - Sensors, 2014 - mdpi.com
This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

Recent advances in mems-based 3d hemispherical resonator gyroscope (hrg)—a sensor of choice

AR Ranji, V Damodaran, K Li, Z Chen, S Alirezaee… - Micromachines, 2022 - mdpi.com
Macro-scale, hemispherical-shaped resonating gyroscopes are used in high-precision
motion and navigation applications. In these gyroscopes, a 3D wine-glass, hemispherical …

A review on vibrating beam-based micro/nano-gyroscopes

K Larkin, M Ghommem, M Serrano… - Microsystem Technologies, 2021 - Springer
A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

Size optimization of MEMS gyroscopes using substructuring

D Giannini, G Bonaccorsi, F Braghin - European Journal of Mechanics-A …, 2020 - Elsevier
In this paper we present an innovative approach to the automatic design of MEMS
gyroscopes, based on structural size optimization. A novel design environment, called …

A piezoelectric gyroscope with self-equilibrated coriolis force based on overtone thickness-shear modes of a lithium niobate plate with an inversion layer

Z Wang, M Zhao, J Yang - IEEE Sensors Journal, 2014 - ieeexplore.ieee.org
We propose a new structure for piezoelectric gyroscope application. It is made from a Z-cut
lithium niobate plate with a ferroelectric inversion layer. It is shown theoretically that when …

Closed loop driving and detect circuit of piezoelectric solid-state micro gyroscope

Y He, X Wu, F Zheng, W Chen, W Zhang, F Cui… - Microsystem …, 2014 - Springer
Piezoelectric solid-state micro gyroscope is a novel kind of rotating rate sensor, which is
based on the special thickness-shear vibrating mode of a piezoelectric body. Compared with …

Piezoelectric Materials Full-Matrix Constants Characterization Based on Local Electrodes Using One Sample

Q Feng, X Wu, J Zhao, Z Zeng, J Li, C Yin - Journal of Shanghai Jiaotong …, 2023 - Springer
A novel characterization method for full-matrix constants of PZT-8 piezoceramics based on
local electrodes excitation using one sample is proposed to avoid resonant peaks missing …

Reliability analysis of random vibration for a CCGA624 component based on an improved Miner's rule

L Qi, W Xu, J Yu, Q Liu, D Xie, Y Wu, R Yang… - Journal of Materials …, 2023 - Springer
In this paper, out-of-plane random vibration reliability of a ceramic column grid array (CCGA)
package was tested in accordance with the ECSS-Q-70-08C standard. Microstructure …

Optimal design of piezoelectric micromachined modal gyroscope (PMMG) with modes matched: modal analysis

X Wu, W Chen, A Reza - Microsystem Technologies, 2015 - Springer
Piezoelectric micromachined modal gyroscope is a solid state inertial sensor, which uses a
special mode of PZT block as the reference mode of the gyroscope conventionally. In the …

[引用][C] 压电谐振器特殊模态振动特性研究

梁天晨, 吴校生, 李志超 - 半导体光电, 2020