A Review of Mechanical Fine-Pointing Actuators for Free-Space Optical Communication
M Milaševičius, L Mačiulis - Aerospace, 2023 - mdpi.com
This paper presents a state-of-the-art overview of fine beam steering mechanisms for free-
space optical communication on satellites. Precise beam pointing is a critical task for the …
space optical communication on satellites. Precise beam pointing is a critical task for the …
On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle
HC Cheng, SC Liu, CC Hsu, HY Lin, F Shih… - Sensors and Actuators A …, 2023 - Elsevier
This study designs and implements the piezoelectric MEMS scanning mirror with large scan
angle and reflection area for light beam manipulating applications. In this design, the …
angle and reflection area for light beam manipulating applications. In this design, the …
Piezoelectric MEMS mirrors for the next generation of small form factor AR glasses
N Boni, R Carminati, G Mendicino… - MOEMS and …, 2022 - spiedigitallibrary.org
The adoption of MEMS mirrors has been rapidly growing in recent years, involving different
types of applications. One of the most challenging applications for Laser Beam Scanning …
types of applications. One of the most challenging applications for Laser Beam Scanning …
Low power compact 3D-constructed AlScN piezoelectric MEMS mirrors for various scanning strategies
JY Hwang, L Wysocki, E Yarar, G Wille, F Röhr… - Micromachines, 2023 - mdpi.com
In this paper, the newly developed 3D-constructed AlScN piezoelectric MEMS mirror is
presented. This paper describes the structure and driving mechanism of the proposed mirror …
presented. This paper describes the structure and driving mechanism of the proposed mirror …
Biaxial piezoelectric MEMS mirrors with low absorption coating for 1550 nm long-range LIDAR
L Mollard, J Riu, S Royo, C Dieppedale, A Hamelin… - Micromachines, 2023 - mdpi.com
This paper presents the fabrication and characterization of a biaxial MEMS (
MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which …
MicroElectroMechanical System) scanner based on PZT (Lead Zirconate Titanate) which …
Shock destructive reliability analysis of electromagnetic MEMS micromirror for automotive LiDAR
Light Detection and Ranging (LiDAR) devices are preferred sensors in the field of automatic
and intelligent driving. LiDAR based on Micro-Electro-Mechanical Systems (MEMS) …
and intelligent driving. LiDAR based on Micro-Electro-Mechanical Systems (MEMS) …
Single Crystal PMN-PT Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications
JY Hwang, H Yoon, SG Lee, HS Park… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
A new type of piezoelectric scanning micromirror using single-crystal lead magnesium
niobate-lead titanate (PMN-PT) is presented in this article. The micromirror is designed for …
niobate-lead titanate (PMN-PT) is presented in this article. The micromirror is designed for …
Dynamic imaging of micro-vibrations with an ultra-wide bandwidth and a femtometer noise using switchable pulsed laser interferometry
Imaging the complex dynamics of micro-vibrations plays a fundamental role in the
investigation of microelectromechanical systems (MEMS). However, it remains a challenge …
investigation of microelectromechanical systems (MEMS). However, it remains a challenge …
Prediction of the drift trend in piezoelectrically actuated MEMS mirror by 2D reliability modelling
M Manzotti, Z Rezvani, I Pedaci, PS Barbato… - Microelectronics …, 2023 - Elsevier
One of the most prominent applications of piezoelectric materials is in
microelectromechanical systems (MEMS). A current challenge in piezo-MEMS is the …
microelectromechanical systems (MEMS). A current challenge in piezo-MEMS is the …