MEMS and MOEMS gyroscopes: A review

W Huang, X Yan, S Zhang, Z Li, JNA Hassan, D Chen… - Photonic Sensors, 2023 - Springer
Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

Designing of a MOEMS gyroscope based on an asymmetric-grating hybrid-plasmonic ROC

J Gholinejad, K Abedi - Arabian Journal for Science and Engineering, 2023 - Springer
This article introduces a double-sided vibrating MOEMS gyroscope which uses a readout
circuit with a novel technique based on an asymmetric Au grating. The proposed asymmetric …

High-Sensitivity MOEMS Gyroscope Based on Photonic Crystal Wavelength Modulation

X Yang, D Xia, B Fu, J Li, J Zhao… - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
In this article, a two-dimensional (2-D) tunable photonic crystal wavelength-modulated micro-
opto-electro-mechanical system (MOEMS) gyroscope is reported. The device consists of a …

Theoretical design and analysis of multichannel plasmonic switch based on triangle resonator combined with silver bar

J Zhang, H Feng, L Ran, Y Gao - Optics Communications, 2022 - Elsevier
A multichannel plasmonic switch consisted of four metal–insulator–metal (MIM) waveguides
and an equilateral triangle resonator (ETR) with a silver bar is proposed. Calculated by …

Design and simulation of a waveguiding MOEMS gyroscope with ultrawide optical bandwidth based on tunable cascaded Fabry–Perot cavities

Z Zhang, X Wang, C Fan, L Jin, M Li, C Xin - Optics Communications, 2024 - Elsevier
In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is
proposed, using tunable cascaded Fabry–Perot cavities consisting of Bragg mirrors. Input …

A lumped mass model for circular micro-resonators in coriolis vibratory gyroscopes

X Ding, JIA Jia, Z Qin, Z Ruan, L Zhao, H Li - Micromachines, 2019 - mdpi.com
Coriolis vibratory gyroscopes (CVGs) with circular micro-resonators, such as hemispherical,
ring, and disk resonators, exhibit excellent performances and have extraordinary potential …

Tunable Triple Plasmonically Induced Transparency in Triangular Cavities Coupled with an MDM Waveguide

J Zhang, H Feng, C Liu, D Fang, J Wang, L Wang… - Photonics, 2022 - mdpi.com
In this paper, a side-coupled triangle cavity in a plasmonic waveguide structure is proposed
and numerically analyzed by the finite-difference time-domain (FDTD) method and coupled …

Characterization of Modal Frequencies and Orientation of Axisymmetric Resonators in Coriolis Vibratory Gyroscopes

X Ding, H Zhang, L Huang, L Zhao, H Li - Micromachines, 2021 - mdpi.com
This paper presents the characterization of the modal frequencies and the modal orientation
of the axisymmetric resonators in Coriolis vibratory gyroscopes based on the approaches of …

Рамочный микрооптоэлектромеханический преобразователь угловой скорости с узлами оптического считывания на основе оптического туннельного …

ВИ Бусурин, АВ Казарьян, СГ Штек, МА Жеглов… - Измерительная …, 2023 - izmt.ru
Аннотация Предложена модель рамочного микрооптоэлектромеханического
преобразователя угловой скорости с электростатическим возбуждением первичных …

Frame Micro-Optoelectromechanical Angular Velocity Transducer with Optical Readout Units Based on the Optical Tunneling Effect

VI Busurin, AV Kazaryan, SG Shtek, MA Zheglov… - Measurement …, 2022 - Springer
The article proposes a model of a frame micro-optoelectromechanical angular velocity
transducer with electrostatic excitation of primary oscillations. The transducer comprises …