Optical scanning microscopy techniques based on the polarization control of the light have
the capability of providing non invasive label-free contrast. By comparing the polarization …

This article provides a brief overview of both established and novel ellipsometry techniques,
as well as their applications. Ellipsometry is an indirect optical technique, in that information …

In this paper we describe a new Mueller matrix (MM) microscope that generalizes and
makes quantitative the polarized light microscopy technique. In this instrument all the …

Circular Intensity Differential Scattering (CIDS) provides a differential measurement of the
circular right and left polarized light and has been proven to be a gold standard label-free …

The main object of this chapter is to give an overview the possibilities offered by instruments
capable of measuring full Mueller matrices in the field of optical characterization. We have …

The pursuit of sculpting materials at increasingly smaller and deeper scales remains a
persistent subject in the field of micro-and nanofabrication. Anisotropic deep-reactive ion …

Polarization rotation in isotropic materials is commonly associated with chirality, ie,
structures with a handedness which are not identical with their mirror image. We observe …

We propose a polarized, angle-resolved spectral (PARS) reflectometry for simultaneous
thickness and refractive-index measurement of ultra-thin films in real time. This technology …

Angle-resolved ellipsometry with back focal plane imaging has been found to be of
increasing importance in recent industrial sensing by virtue of its rich information provided at …

Optical scatterometry is one of the most important metrology techniques for process
monitoring in high-volume semiconductor manufacturing. By comparing measured …