The atomic force microscope (AFM) is not only a tool to image the topography of solid
surfaces at high resolution. It can also be used to measure force-versus-distance curves …

A force‐based scanning Kelvin probe microscope has been applied to the problem of
dopant profiling in silicon. Initial data analysis assumed the detected electrostatic force …

In this paper we quantitatively compare different electrostatic models, which describe the
interaction between the tip of an electrically biased atomic force microscopy cantilever and a …

The atomic force microscope (AFM) is a powerful tool for surface imaging at the nanometer
scale and surface force measurements in the piconewton range. Among long-range surface …

A new contactless device internal test technique is introduced based on a scanning force
microscope enabling dynamic voltage contrast within passivated integrated circuits. A …

Measurements of the physical form and morphology of dielectrics and of their chemical
characteristics and physical properties have become increasingly important at micron and …

A method is developed for obtaining nanoscale dielectric constant maps of any material,
using dynamic Electrostatic Force Microscopy (EFM) in conjunction with an analytical model …

For the first time a scanning force microscope based test system is used for device internal
electrical characterization of monolithic microwave integrated circuits (MMIC) based on III-V …

Following existing trends in microelectronic engineering scanning force microscope test
systems have been developed as a tool for sub micron device characterisation. Performance …

This work results from application of a scanning Kelvin probe force microscope to reliability
and failure analysis needs of the US semiconductor industry. Applying the scanning Kelvin …