Research status and development trend of MEMS switches: A review

T Cao, T Hu, Y Zhao - Micromachines, 2020 - mdpi.com
MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

A review on RF micro-electro-mechanical-systems (MEMS) switch for radio frequency applications

Kurmendra, R Kumar - Microsystem Technologies, 2021 - Springer
This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

High force density textile electrostatic clutch

R Hinchet, H Shea - Advanced Materials Technologies, 2020 - Wiley Online Library
Clutches are key elements for blocking or coupling motion in wearable systems such as soft
exoskeletons, haptic clothing, and rehabilitation equipment. Electrostatic clutches …

Comprehensive study on RF-MEMS switches used for 5G scenario

LY Ma, N Soin, MHM Daut, SFWM Hatta - IEEE Access, 2019 - ieeexplore.ieee.org
This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

Recent advances in flexible RF MEMS

Y Shi, Z Shen - Micromachines, 2022 - mdpi.com
Microelectromechanical systems (MEMS) that are based on flexible substrates are widely
used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches …

Low insertion loss and high isolation capacitive RF MEMS switch with low pull-in voltage

Y Mafinejad, A Kouzani, K Mafinezhad… - … International Journal of …, 2017 - Springer
Micro electromechanical system (MEMS) shunt capacitive switches behave chiefly as a
capacitor at both up and down states. Therefore, input-output matching for these switches is …

Materials selection approaches and fabrication methods in RF MEMS switches

Kurmendra, R Kumar - Journal of Electronic Materials, 2021 - Springer
A state of the art review on Radio Frequency Micro-Electromechanical Systems (RF MEMS)
capacitive switches is reported by considering two key aspects:(1) materials selection …

Performance analysis of EBG bandstop filter using U: shaped meander type electrostatically actuated RF MEMS switch

G Shanthi, KS Rao, KG Sravani - Microsystem Technologies, 2021 - Springer
Now a days, filters became essential component in many of the RF, satellites and wireless
communication networks and system. The size and complexity of the system increases while …

Design and analysis of a RF MEMS shunt switch using U-shaped meanders for low actuation voltage

G Shanthi, K Srinivasa Rao, K Girija Sravani - Microsystem Technologies, 2020 - Springer
This paper presents the design and simulation of RF MEMS switch using uniform U-Shaped
meanders. High isolation and low insertion loss are the main performance parameters …

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

LY Ma, AN Nordin, N Soin - Microsystem technologies, 2016 - Springer
This paper presents the design, optimization and simulation of a radio frequency (RF) micro-
electromechanical system (MEMS) switch. The capacitive RF-MEMS switch is …