Originally developed in the late 1960s, anodic bonding, also known as electrostatic bonding,
field-assisted bonding or Mallory bonding, has become one of the most important silicon …

Microelectromechanical systems (MEMS) are the basis of many rapidly growing
technologies, because they combine miniature sensors and actuators with communications …

In this paper, we investigate thermoelastic dissipation (TED) in systems whose thermal
response is characterized by multiple time constants. Zener [Phys. Rev. 52, 230 (1937)] …

At micro-and nanoscales, materials with high Young's moduli and low densities are of great
interest for high-frequency micromechanical resonator devices,,,,,,,. Incorporating carbon …

Bi 2 Te 3 based thermoelectric devices typically use a nickel layer as a diffusion barrier to
block the diffusion of solder or copper atoms from the electrode into the thermoelectric …

Nanotechnology is changing the world in a very big way, but at the atomic and sub-atomic
level. Although the roots of nanotechnology can be traced back to more than a century ago …

Under certain circumstances, decreasing the dimensions of a material may lead to elastic or
anelastic properties that diverge from bulk behavior. A distinction is made between elastic …

Epitaxial films of (1− x) Pb (Yb 1/2 Nb 1/2) O 3− x PbTiO 3 (PYbN–PT, x= 0.4, 0.5) with
SrRuO 3 bottom electrodes were prepared on (100) LaAlO 3,(100) SrTiO 3, and (111) SrTiO …

New protective coating layers for use in wet etch processes during the production of
semiconductor and MEMS devices are provided. The layers include a primer layer, a first …

New protective coating layers for use in wet etch processes during the production of
semiconductor and MEMS devices are provided. The layers include a primer layer, a first …