With advantages of small size, light weight, flexible design, and easy mass production, micro-
optical components of hard materials have a wide range of potential applications in artificial …

Light microscopes are the most widely used devices in life and material sciences that allow
the study of the interaction of light with matter at a resolution better than that of the naked …

Topography measurement is essential for surface characterization, semiconductor
metrology, and inspection applications. To date, performing high-throughput and accurate …

The increase in the number and complexity of process levels in semiconductor production
has driven the need for the development of new measurement methods that can evaluate …

In the past decade, the emergence of ultrathin 2D films consisting of only a few atomic layers
deposited on various substrates sparked new ideas and research. This Perspective provides …

Microsphere-assisted super-resolution imaging technology offers label-free, real-time
dynamic imaging via white light, which has potential applications in living systems and the …

Some new unusual physical phenomena and effects associated with dielectric mesoscale
particles with typical Mie size parameter around 10 were studied and have been discovered …

Background: High-throughput three-dimensional metrology techniques for monitoring in-
wafer uniformity (IWU) and in-cell uniformity (ICU) are critical for enhancing the yield of …

Spectroscopic ellipsometry is a widely used optical technique in both industry and research
for determining the optical properties and thickness of thin films. The effective use of …

As semiconductor devices shrink and their manufacturing processes advance, accurately
measuring in-cell critical dimensions (CD) becomes increasingly crucial. Traditional test …