Abstract Micro-electromechanical systems (MEMS)-based devices comprise suspended
structures. A sacrificial layer is required to realize these structures. Usually, metal and …

This paper investigates efficient actuation methods of shunt MEMS switches and other
parallel-plate actuators. We start by formulating a multi-physics model of the micro switch …

A simple structure, high-force and high isolation metal contact RF MEMS switch was
fabricated based on micro electroplating technology, and the mechanical and RF …

Conventional RF MEMS switches rely on metal-to-dielectric or metal-to-metal contacts.
Some problems in the" solid-solid" contact, such as contact degradation, signal bounce and …

В современной микроэлектронике интенсивно развивающимся сектором являются
микроэлектромеханические системы (MEMS-MicroElectroMechanical Systems) …

An intensely developing aspect of advanced microelectronics is microelectromechanical
systems (MEMS). The present paper describes various issues associated with the …

An intensely developing aspect of advanced microelectronics is microelectromechanical
systems (MEMS). The present paper describes various issues associated with the …

본 논문에서는 듀로이드와 FR4 를 기판으로 하는 재배선층 위에 정전 구동 방식의 RF MEMS
스위치와 승압 DC-DC 컨버터를 결합하는 연구를 진행하였다. 상용 PCB (Printed Circuit …

This paper presents a hetero-integration of electrostatically actuated RF MEMS Switch and
step up DC-DC converter on a redistribution layer using commercial PCB process. RF …

A new design of micro electrostatic actuator with low driving voltage is presented in this
paper. It can reduce the operation voltage effectively without decreasing the gap between …