Inertial navigation represents a unique method of navigation, in which there is no
dependency on external sources of information. As opposed to other position fixing …

Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-
mechanical system (MOEMS) are the new-generation and recently well-developed …

In this article, a two-dimensional (2-D) tunable photonic crystal wavelength-modulated micro-
opto-electro-mechanical system (MOEMS) gyroscope is reported. The device consists of a …

Cavity optomechanics with picometer displacement measurement resolution has shown vital
applications in high-precision sensing areas. In this paper, an optomechanical micro …

A novel laterally and micro-electro-thermally actuated RF MEMS switch is presented in this
paper. Despite many RF MEMS switches requiring continuous actuation voltage to hold the …

In this paper, a waveguiding MOEMS gyroscope with an ultrawide optical bandwidth is
proposed, using tunable cascaded Fabry–Perot cavities consisting of Bragg mirrors. Input …

Micro-gyroscopes based on the Coriolis principle are widely employed in inertial navigation,
motion control, and vibration analysis applications. Conventional micro-gyroscopes often …

A silicon-on-insulator (SOI) device is an important integrated circuit technology containing
an insulating material. In this paper, an SOI wafer consisting of n-type silicon grown on the …

Diagnosing the vibration in automobiles is a priority since it provides comfort to the
passenger inside vehicle. This paper presents MOEMS accelerometer sensor by using …

ABSTRACT The Micro Opto Electro Mechanical System (MOEMS) is a most promising
cutting-edge technology development that uses recent trends and has huge potential for use …