YM You, JS Lee, MH Kim, SJ Hong - Journal of Vacuum Science & …, 2024 - pubs.aip.org
A potential source of particle contamination due to poorly maintained PECVD chamber condition forces to perform in situ dry cleaning also actively employed before the wet …
M Matsui, M Morimoto, N Ikeda… - Japanese Journal of …, 2014 - iopscience.iop.org
The mechanism of highly selective etching by a pulsed-microwave electron-cyclotron- resonance plasma was investigated by analyzing surface-reaction layers formed on …
K Ford, DJ Peterson, J Brandon, SK Nam… - Physics of …, 2019 - pubs.aip.org
In situ plasma diagnostics present the classical problem of the scientific measurement: how does one accurately measure a system without also perturbing it? The uncertainty in the …
In plasma materials processing, such as plasma etching, control of the time-averaged electron energy distributions (EEDs) in the plasma allows for control of the time-averaged …
M Matsui, T Usui, H Yasunami, T Ono - Journal of Vacuum Science & …, 2016 - pubs.aip.org
The mechanism of highly selective etching of SiO 2 using pulsed-microwave electron- cyclotron-resonance plasma was investigated by analyzing the relationship between plasma …
N Possémé, M Garcia-Barros, C Arvet… - Journal of Vacuum …, 2020 - pubs.aip.org
Using CH 3 F/O 2/He based chemistries in high density plasmas for silicon nitride spacer etching, loss of silicon in active source/drain regions of CMOS transistors can be observed …
C Xue, F Gao, YX Liu, J Liu, YN Wang - Chinese Physics B, 2018 - iopscience.iop.org
A retarding field energy analyzer (RFEA) is used to measure the time-averaged ion energy distributions (IEDs) on the substrate in both continuous wave (CW) and synchronous pulse …
N Sirse, A Mishra, GY Yeom… - Journal of Vacuum Science …, 2016 - pubs.aip.org
The electron density, ne, modulation is measured experimentally using a resonance hairpin probe in a pulsed, dual-frequency (2/13.56 MHz), dual-antenna, inductively coupled plasma …
Crisis in coronavirus times requires understanding the effects on society and establishing efficient mechanisms to prevent infections. The disinfection of personal protection equipment …