A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom
Y Su, Y Liu, Y Wang, Q Sun, Q Qiao, Z Weng… - Sensors and Actuators A …, 2024 - Elsevier
This paper presents the design of a novel 3× 3 piezoelectric micromirror array (PMMA) with
an 84.6% fill factor and describes a three-dimensional hidden fabrication platform. The …
an 84.6% fill factor and describes a three-dimensional hidden fabrication platform. The …