Design and fabrication of silicon oxynitride based evanescent optical waveguide sensor for rapid detection of adulteration in petrol
In this paper we report on the design and fabrication of an Evanescent Optical Waveguide
Sensor (EOWS) using silicon oxynitride (SiON) as the core layer on silica-silicon wafer and …
Sensor (EOWS) using silicon oxynitride (SiON) as the core layer on silica-silicon wafer and …