Developments in CVD delivery systems: A chemist's perspective on the chemical and physical interactions between precursors

P O'Brien, NL Pickett, DJ Otway - Chemical Vapor Deposition, 2002 - Wiley Online Library
Important factors in considering compounds for use as precursors in CVD techniques are
discussed. Conventionally, volatility along with precursor purity and clean decomposition to …

Highly strained InAs quantum wells on InP substrates for mid-IR emission

S Kim, J Kirch, L Mawst - Journal of crystal growth, 2010 - Elsevier
Optical emission characteristics of indium arsenide (InAs) quantum wells were studied using
organometallic vapor phase epitaxy (OMVPE). Low growth temperature (< 500° C) and …

Metal organic vapour-phase epitaxy (MOVPE) growth of InP and InGaAs using tertiarybutylarsine (TBA) and tertiarybutylphosphine (TBP) in N2 ambient

D Keiper, R Westphalen, G Landgren - Journal of crystal growth, 1999 - Elsevier
We have investigated the growth of InP and InGaAs/InP using TBA and TBP in N2 ambient.
This process eliminates both the explosive H2 and the toxic hydrides as precursors. General …

Transport measurements and donor spectra of very high purity GaAs grown using tertiarybutylarsine and triethylgallium

SP Watkins, DM Brake, G Haacke - Journal of applied physics, 1994 - pubs.aip.org
Very high purity n‐type GaAs epilayers were grown by low pressure metalorganic chemical
vapor deposition using triethylgallium and tertiarybutylarsine (TBA) or arsine (AsH3). Peak …

High quality 0.98 μm GaInAs/GaAs/GaInP lasers grown by CBE using tertiarybutylarsine and tertiarybutylphosphine

JC Garcia, P Maurel, JP Hirtz - Electronics Letters, 1993 - IET
HIgh quality GaInAs/GaAs/GaInP laser structures were grown by chemical beam epitaxy
using tertiarybutylarsine (TBAs) and tertiarybutylphosphine (TBP) under pulsed conditions …

Growth characteristics of hydride-free chemical beam epitaxy and application to GaInP/GaAs heterojunction bipolar transistors

J Garcia, C Dua, S Mohammadi, JW Park… - Journal of electronic …, 1998 - Springer
We report on the complete characterization of a hydride-and hydrogen-free chemical beam
epitaxy (CBE) process for the realization of GaAs/GaInP heterojunction bipolar transistors …

Compressively strained 1.55-um InxGa1-xAsyP1-y/InP quantum well laser diodes grown by MOCVD with tertiarybutylarsine (TBA) and tertiarybutylphosphine (TBP)

SP DenBaars, AL Holmes Jr… - … Diode Technology and …, 1994 - spiedigitallibrary.org
Recent progress on the use of liquid organometallic sources for replacing the group V
compressed gases looks particularly encouraging. We have grown both strained and …

Selective epitaxial growth of GaInP by low‐pressure metal‐organic chemical‐vapor deposition using ethyldimethylindium as In source

SH Chan, SM Sze, CY Chang, WI Lee - Applied physics letters, 1994 - pubs.aip.org
We have demonstrated the feasibility of selective epitaxial growth (SEG) of GaInP using low‐
pressure metal‐organic chemical‐vapor deposition (LPMOCVD) with the combination of …

Interband Mid-IR Semiconductor Lasers

LJ Mawst - IEEE Photonics Journal, 2010 - ieeexplore.ieee.org
Significant advances in the room-temperature (RT) continuous-wave (CW) output power of
both type-l quantum-well (QW) active-layer lasers and interband cascade lasers have been …

High quality long wavelength lasers grown by atmospheric pressure MOCVD with liquid group V sources

ME Heimbuch, AL Holmes, MP Mack… - 1993 (5th) …, 1993 - ieeexplore.ieee.org
The authors have achieved low threshold In/sub x/Ga/sub 1-x/As/InP quantum well laser
diodes, grown in a non-hydride metalorganic chemical vapor deposition system at …