Recent trends in piezoelectric actuators for precision motion and their applications: A review

S Mohith, AR Upadhya, KP Navin… - Smart Materials and …, 2020 - iopscience.iop.org
The need for precision positioning applications has enormously influenced the research and
development towards the growth of precision actuators. Over the years, piezoelectric …

MEMS mirrors for LiDAR: A review

D Wang, C Watkins, H Xie - Micromachines, 2020 - mdpi.com
In recent years, Light Detection and Ranging (LiDAR) has been drawing extensive attention
both in academia and industry because of the increasing demand for autonomous vehicles …

Review of recent development of MEMS speakers

H Wang, Y Ma, Q Zheng, K Cao, Y Lu, H Xie - Micromachines, 2021 - mdpi.com
Facilitated by microelectromechanical systems (MEMS) technology, MEMS speakers or
microspeakers have been rapidly developed during the past decade to meet the …

Flexible and controllable metadevice using self-assembly MEMS actuator

R Xu, YS Lin - Nano Letters, 2021 - ACS Publications
In this work, an actively tunable optical metadevice is proposed to realize multifunctional
application by integrating self-assembly electrothermal actuator (ETA) and magnetic …

Further results on hysteresis compensation of smart micropositioning systems with the inverse Prandtl–Ishlinskii compensator

M Al Janaideh, M Rakotondrabe… - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
A formula that characterizes the output of the inverse compensation is derived when the
inverse Prandtl-Ishlinskii hysteresis model is applied as a feedforward compensator. For that …

Scanning micromirror platform based on MEMS technology for medical application

E Pengwang, K Rabenorosoa, M Rakotondrabe… - Micromachines, 2016 - mdpi.com
This topical review discusses recent development and trends on scanning micromirrors for
biomedical applications. This also includes a biomedical micro robot for precise …

A review of micromirror arrays

Y Song, RM Panas, JB Hopkins - Precision Engineering, 2018 - Elsevier
The aim of this paper is to provide a review of micromirror array (MMA) technologies (2631
MMA research papers and patents were reviewed for this effort). The performance …

Analysis of the nonlinear response of piezo-micromirrors with the harmonic balance method

A Opreni, N Boni, R Carminati, A Frangi - Actuators, 2021 - mdpi.com
In this work, we address the simulation and testing of MEMS micromirrors with hardening
and softening behaviour excited with patches of piezoelectric materials. The forces exerted …

Harvesting raindrop energy with piezoelectrics: a review

CH Wong, Z Dahari, A Abd Manaf… - Journal of Electronic …, 2015 - Springer
Harvesting vibration energy from piezoelectric material impacted by raindrops has proved to
be a promising approach for future applications. A piezoelectric harvester has interesting …

On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle

HC Cheng, SC Liu, CC Hsu, HY Lin, F Shih… - Sensors and Actuators A …, 2023 - Elsevier
This study designs and implements the piezoelectric MEMS scanning mirror with large scan
angle and reflection area for light beam manipulating applications. In this design, the …