Suspended photonic waveguides with top side sealing

L Chen, L Chen, C Doerr - US Patent 10,416,380, 2019 - Google Patents
Techniques for forming a photonic device that includes a suspended photonic structure
suspended over a silicon substrate are described. A sealed cavity is positioned between the …

Spot-size-converter design for facet optical coupling

L Chen, C Doerr - US Patent 10,416,381, 2019 - Google Patents
A facet optical coupler, and techniques for forming a facet optical coupler, that includes a
waveguide disposed in a trench of a substrate are described. The substrate may be a silicon …

Filling a cavity through a reservoir and a feed-channel and related apparatus and methods

L Chen, C Doerr - US Patent 10,241,268, 2019 - Google Patents
Aspects of the present application provide an optical device comprising a suspended optical
component over a cavity, such as an undercut region in a substrate. The cavity is filled with a …

Cantilevers with one-or two-dimensional actuation for on-chip active waveguide coupling alignment

C Doerr, L Chen, L Chen - US Patent 10,345,525, 2019 - Google Patents
Photonic integrated circuits including controllable cantilevers are described. Such photonic
integrated circuits may be used in connection with other optical devices, in which light is …

Facet optical coupler

L Chen - US Patent 10,203,453, 2019 - Google Patents
Techniques for forming a facet optical coupler to couple light at an edge of silicon substrate
are described. The facet optical coupler includes a silicon substrate, a layer of second …

Suspended cantilever waveguide

L Chen, C Doerr, L Chen - US Patent 10,571,633, 2020 - Google Patents
Cantilevered waveguides suspended above an air cavity in an underlying substrate are
described. The waveguide is formed by patterning a waveguide layer in some embodi …

Edge couplers including a metamaterial layer

Y Bian - US Patent 11,803,016, 2023 - Google Patents
Structures for an edge coupler and methods of fabricating such structures. The structure
includes a substrate, a waveguide core, and a metamaterial layer positioned in a vertical …

Waveguide coupler

RM Hickey - US Patent App. 17/737,743, 2022 - Google Patents
An example device comprises: a substrate comprising a waveguide material having a
waveguide refractive index (RIwG); a first layer of oxide on the substrate having an RI, lower …

Edge couplers with non-linear tapers

Y Bian - US Patent 11,808,995, 2023 - Google Patents
Structures for an edge coupler and methods of fabricating such structures. The structure
includes a back-end-of-line stack located over a substrate. The back-end-of-line stack …

Integrated wavelength selector

L Chen - US Patent 11,556,020, 2023 - Google Patents
Integrated wavelength selectors are described. The wavelength selector may include silicon
nitride ring resonator disposed vertically between a heater and a temperature sensor. The …