We introduce the new concept of orientation Zernike polynomials, a base function
representation of retardation and diattenuation in close analogy to the wavefront description …

Heterodyne efficiency is referred as a measure of the quality for the coherent laser
communication. The heterodyne efficiency not only reflects the matching of phase and …

Due to the ability to achieve a wide-diffraction-limited field of view, three-mirror anastigmat
(TMA) telescopes are widely used in many applications that demand high imaging quality …

摘要提出了一种基于八角度孤立空检测标记的超高NA 光刻投影物镜高阶波像差检测方法.
通过对八角度孤立空检测标记的空间像进行主成分分析(PCA) 和多元线性回归分析 …

In single-molecule orientation localization microscopy, valuable information about the
orientation and longitudinal position of each molecule is often encoded in the shape of the …

Imaging-based measurement methods of polarization aberration (PA) are indispensable in
hyper-numerical aperture projection optics for advanced lithography. However, the current …

For hyper-numerical aperture (NA) lithographic optics, one of the design goals is to minimize
polarization aberration (PA). However PA represented by Jones pupil can not be acquired …

摘要在使用自适应光学系统校正的激光传输系统中, 光学薄膜的偏振效应会造成偏振色差,
导致自适应光学系统的校正能力下降. 基于激光传输系统中常用的卡塞格林系统 …

With the shrinking of the critical dimension, the impact of polarization aberration on
lithographic imaging becomes increasingly prominent. In this paper, the linear relationships …

Currently, the deteriorated lithography imaging caused by polarization aberration is
increasingly prominent. Therefore measuring the polarization aberration accurately also …