Advances in AFM for the electrical characterization of semiconductors

RA Oliver - Reports on Progress in Physics, 2008 - iopscience.iop.org
Atomic force microscopy (AFM) is a key tool for nanotechnology research and finds its
principal application in the determination of surface topography. However, the use of the …

Nanoscale Measurements of Lithium‐Ion‐Battery Materials using Scanning Probe Techniques

L Danis, SM Gateman, C Kuss… - …, 2017 - Wiley Online Library
State‐of‐the‐art scanning probe microscopy (SPM) methods as applied to energy
conversion and storage devices, specifically lithium‐ion batteries, are reviewed with an …

[图书][B] Handbook of surface and interface analysis: methods for problem-solving

JC Riviere, S Myhra - 2009 - taylorfrancis.com
The original Handbook of Surface and Interface Analysis: Methods for Problem-Solving was
based on the authors' firm belief that characterization and analysis of surfaces should be …

Tunneling atomic-force microscopy as a highly sensitive mapping tool for the characterization of film morphology in thin high-k dielectrics

V Yanev, M Rommel, M Lemberger, S Petersen… - Applied Physics …, 2008 - pubs.aip.org
High-k dielectric layers (⁠ Hf Si x O y and Zr O 2⁠) with different film morphologies were
investigated by tunneling atomic-force microscopy (TUNA). Different current distributions …

A review of advanced scanning probe microscope analysis of functional films and semiconductor devices

G Benstetter, R Biberger, D Liu - Thin Solid Films, 2009 - Elsevier
This paper gives an overview of established methods and new developments in the field of
Scanning Probe Microscopy (SPM) of functional films and semiconductor devices. It focuses …

Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques

M Rommel, G Spoldi, V Yanev, S Beuer… - Journal of Vacuum …, 2010 - pubs.aip.org
Scanning probe microscopy techniques and, in particular, scanning spreading resistance
microscopy (SSRM) were used for a detailed characterization of focused ion beam (FIB) …

[图书][B] Characterization of nanostructures

S Myhra, JC Rivière - 2012 - books.google.com
The techniques and methods that can be applied to materials characterization on the
microscale are numerous and well-established. Divided into two parts, Characterization of …

Characterization of elastomeric blends by atomic force microscopy

P Achalla, J McCormick, T Hodge… - Journal of Polymer …, 2006 - Wiley Online Library
The bulk mechanical properties of a blend of elastomers are found to depend on the micro
and nano scale morphology of the phases of the materials in the blend. In this study, we …

Envision and Appraisal of Biomolecules and Their Interactions through Scanning Probe Microscopy

P Ghoderao, S Sahare, SL Lee, P Sonar - Small Structures, 2023 - Wiley Online Library
Scanning probe microscopy (SPM) has gifted a novel eye to envision nanotechnology and
nanoscience. The SPM technique involves a sharp probe that moves over the sample …

Nanoscale Characterization of TiO2 Films Grown by Atomic Layer Deposition on RuO2 Electrodes

K Murakami, M Rommel, B Hudec… - … Applied Materials & …, 2014 - ACS Publications
Topography and leakage current maps of TiO2 films grown by atomic layer deposition on
RuO2 electrodes using either a TiCl4 or a Ti (Oi-C3H7) 4 precursor were characterized at …