K Ohtsuka, T Matsui, H Ogata - Japanese journal of applied …, 1988 - iopscience.iop.org
Cadmium was diffused into InP and InGaAs using Cd 3 P 2+ P or Cd 3 P 2+ Cd 3 As 2 as the
diffusion sources. Two diffusion fronts were observed. The diffusion characteristics for Cd 3 …