This paper presents a review of radio frequency microelectromechanical systems (RF
MEMS) research within Europe. A tour of Europe is given, identifying the key institutions …

This article presents a study of microswitches with piezoelectric actuation. With the help of
analysis modelling and FEM commercial software (ANSYS), we investigated the potentiality …

建立交直流分离悬臂梁式MEMS (micro-electro-mechanical systems) 开关的四阶段分析模型,
利用该模型对交直流分离悬臂梁式MEMS 开关进行分析发现, 信号线的位置不仅对信号线和膜 …

We demonstrate compact analytical multi-physics models that accurately predict the
deformed shape of a variety of multilayer cantilevers and the associated electrical …

This thesis reports on the development of a novel 77GHz low loss MEMS switch with a
mechanically unrestrained armature, over a RF transmitting coplanar waveguide …

As the communication technology evolves day by day, the demands for low cost, low power,
multifunctional and higher-speed data communication circuits are increasing enormously …

This paper reports on the design of a novel ultra low actuation voltage, low loss radio
frequency micro-electro-mechanical system (RF MEMS) capacitive shunt switch. The …

La conception, le microfabrication, et l'intégration de CMOS des sondes capacitives micro-
électro-mécaniques d'humidité des systèmes (MEMS) sont présentés dans ce travail …

This paper presents a CMOS-compatible RF MEMS technology to build low actuation
voltage switches. SiC increases the stiffness of the switches to improve reliability and …

RF MEMS switches exhibit excellent performance at high frequencies in comparison to
semiconductor devices. The technology of MEMS switches using the electrostatic principle …