Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation
JW Huang, FJ Zhou, XY Lv, YR Zhang, F Gao… - Physics of …, 2023 - pubs.aip.org
Neutral species in nitrogen plasmas play a crucial role in many applications related to
semiconductor fabrication. In this research, a two-dimensional fluid/electron Monte Carlo …
semiconductor fabrication. In this research, a two-dimensional fluid/electron Monte Carlo …