MEMS switch is a movable device manufactured by means of semiconductor technology,
possessing many incomparable advantages such as a small volume, low power …

Innovations in relevant micro-contact areas are highlighted, these include, design, contact
resistance modeling, contact materials, performance and reliability. For each area the basic …

This paper presents a comprehensive study on radio frequency-microelectromechanical
systems (RF-MEMS) switches, which are expected to be extensively integrated into 5G …

This paper is designed to review the MEMS switch by considering key aspects on the basis
of mechanical structure, actuation methods, and types of contact and circuit configurations …

This paper presents an mN-level contact and restoring force RF microelectromechanical
systems metal-contact switch exhibiting high reliability, high linearity, and high power …

Direct contact, ohmic MEMS switches for RF applications have several advantages over
other conventional switching devices. Advantages include lower insertion loss, higher …

This paper reports on a submillimeter-wave 500-750 GHz micorelectromechanical systems
(MEMS) waveguide switch based on a MEMS-reconfigurable surface to block/unblock the …

We present lifetime limitations and failure analysis of many packaged RF MEMS ohmic
contacting switches with Au–Au, Au–Ir, and Au–Pt contact materials operating with 100 µN of …

This work presents radio frequency (RF) microelectromechanical system (MEMS)-based
compact, high power, and reliable tunable bandpass filter for millimeter-wave RF front end …

This paper presents radio frequency (RF) microelectromechanical system-based 3-and 4-bit
phase shifters using single-pole-four-throw (SP4T) and single-pole-eight-throw (SP8T) …