This paper addresses the scheduling problem of single-arm cluster tools with both wafer
residency time constraints and activity time variation in semiconductor manufacturing. Based …

Integrated circuit chips are produced on silicon wafers. Robotic cluster tools are widely used
since they provide a reconfigurable and efficient environment for most wafer fabrication …

This paper illustrates that Petri nets with self-loops are more powerful than pure nets in
modeling and control of flexible manufacturing systems. A self-loop in a Petri net cannot be …

This paper proposes a new modified reachability tree (NMRT) approach for a class of
unbounded generalized Petri nets called ω-independent nets. The NMRT of an ω …

E-commerce business process nets (EBPNs) are a novel formal model for describing and
validating e-commerce systems including interactive parties such as shopper, merchant, and …

A reconfigurable manufacturing system (RMS) means that it can be reconfigured and
become more complex during its operation. In RMSs, deadlocks may occur because of …

Batch processing function and passing value indeterminacy in cooperative systems can be
described and analysed by logic Petri nets (LPNs). To directly analyse the properties of …

In semiconductor manufacturing, wafer residency time constraints make the scheduling
problem of cluster tools complicated. A process module (PM) in cluster tools is prone to …

In a multi-cluster tool, there may be both single and dual-arm cluster tools. Such a multi-
cluster tool is called hybrid multi-cluster tool. To operate such a multi-cluster tool, one needs …

Petri nets are a powerful formalism in modeling workflows. A workflow determines the flow of
work according to pre-defined business process. In many situations, business processes are …