Crossing frequency method applicable to intermediate pressure plasma diagnostics using the cutoff probe

S Kim, J Lee, Y Lee, C Cho, S You - Sensors, 2022 - mdpi.com
Although the recently developed cutoff probe is a promising tool to precisely infer plasma
electron density by measuring the cutoff frequency (f cutoff) in the S 21 spectrum, it is …

The impact of rapid thermal annealing for the ferroelectricity of undoped sputtered HfO2 and its wake-up effect

O Gronenberg, R Marquardt, R Lamprecht… - Journal of Applied …, 2022 - pubs.aip.org
Fundamental aspects of ferroelectric HfO 2⁠, a fluorite-type oxide, are not understood yet.
This is evident by different theories regarding, eg, the wake-up effect or the antiferroelectric …

Remediation of lindane contaminated soil by fluidization-like dielectric barrier discharge

S Zhang, Z Liu, S Li, S Zhang, H Fu, X Tu, W Xu… - Journal of Hazardous …, 2023 - Elsevier
This study proposed the fluidization-like dielectric barrier discharge (DBD) plasma for the
remediation of lindane contaminated soil and integrated physical and chemical reaction …

Generation of Neutral Chemically Reactive Species in Low-Pressure Plasma

G Primc - Frontiers in Physics, 2022 - frontiersin.org
The surface finish of organic and inorganic materials treated by gaseous plasma usually
depends on the fluxes and fluencies of chemically reactive species such as molecular …

Electron impact cross-sections of tetraethyl silicate

M Luthra, P Garkoti, K Goswami… - Plasma Sources …, 2022 - iopscience.iop.org
Understanding the interactions of electrons with molecules in plasma is of vital importance
from both academic and technological points of view. Reliable electron collision data is …

Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath

I Seong, S Kim, Y Lee, C Cho, J Lee, W Jeong, Y You… - Sensors, 2022 - mdpi.com
As the importance of ion-assisted surface processing based on low-temperature plasma
increases, the monitoring of ion energy impinging into wafer surfaces becomes important …

[HTML][HTML] Selective removal of single-layer graphene over double-layer graphene on SiO2 by remote oxygen plasma irradiation

L Hu, K Ishikawa, SN Hsiao, M Hori - Applied Surface Science, 2024 - Elsevier
Graphene sheet transferred onto the SiO 2 substrate has various types at different regions
such as single-layer graphene (SLG), double-layer graphene (DLG), and multi-layer …

Stability analysis of linear ion waves leading to nonlinear shock and soliton structures in a dense quantum plasma with strongly coupled ions and degenerate …

U Rehman, S Hassan, I Hussain, SA Khan… - Chinese Journal of …, 2023 - Elsevier
In a quantum plasma with strongly coupled ions and Fermi degenerate electron fluids,
features of low frequency wave dispersion and nonlinear electrostatic structure formation are …

Helium electron beam rf plasma for low-k surface functionalization

EN Voronina, AA Sycheva, AA Solovykh… - Journal of Vacuum …, 2022 - pubs.aip.org
A complex simulation approach is applied to determine optimal conditions for the
functionalization of low-k materials in e-beam rf discharge generated by 1 keV electron …

Development of a High-Linearity Voltage and Current Probe with a Floating Toroidal Coil: Principle, Demonstration, Design Optimization, and Evaluation

S Kim, I Seong, Y Lee, C Cho, W Jeong, Y You, J Lee… - Sensors, 2022 - mdpi.com
As the conventional voltage and current (VI) probes widely used in plasma diagnostics have
separate voltage and current sensors, crosstalk between the sensors leads to degradation of …