[HTML][HTML] Electrostatically actuated nanobeam-based nanoelectromechanical switches–materials solutions and operational conditions
This review summarizes relevant research in the field of electrostatically actuated nanobeam-
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …
based nanoelectromechanical (NEM) switches. The main switch architectures and structural …
Three-dimensional integration of complementary metal-oxide-semiconductor-nanoelectromechanical hybrid reconfigurable circuits
WY Choi, YJ Kim - IEEE Electron Device Letters, 2015 - ieeexplore.ieee.org
Complementary-metal-oxide-semiconductor (CMOS) and nanoelectromechanical (NEM)
hybrid reconfigurable circuits are implemented for the first time using three-dimensional (3D) …
hybrid reconfigurable circuits are implemented for the first time using three-dimensional (3D) …
[HTML][HTML] Fabrication and characterization of double-and single-clamped CuO nanowire based nanoelectromechanical switches
Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation
with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power …
with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power …
On the notion of vdW-force loaded hysteretic switching for precise release voltage design in all-metal electrostatic logic relay
In electrostatic switches, the inability to correlate hysteretic-switching (an electrical attribute)
and adhesion force (a structural attribute) makes the predictive design difficult. The van-der …
and adhesion force (a structural attribute) makes the predictive design difficult. The van-der …
A monolithically integrated torsional CMOS-MEMS relay
We report experimental demonstrations of a torsional microelectromechanical (MEM) relay
fabricated using the CMOS-MEMS approach (or intra-CMOS) which exploits the full foundry …
fabricated using the CMOS-MEMS approach (or intra-CMOS) which exploits the full foundry …
Ultrathin internal dielectric electrostatic actuator for reduced pull-in voltage and bidirectional actuation
Direction and analog deflection control, as well as low voltage digital switching are the most
desirable attributes in electrostatic actuators for current MEMS applications. In this work we …
desirable attributes in electrostatic actuators for current MEMS applications. In this work we …
Optical properties of nanocrystalline La2O3 dielectric films deposited by radio frequency magnetron sputtering
SB Brachetti-Sibaja, SE Rodil, MA Domínguez-Crespo… - Thin Solid Films, 2017 - Elsevier
La 2 O 3 thin films were successfully synthesized by rf magnetron sputtering technique. The
effect of power, deposition time and substrate temperature on the formation and optical …
effect of power, deposition time and substrate temperature on the formation and optical …
Flexible complementary metal oxide semiconductor microelectrode arrays with applications in single cell characterization
A highly flexible microelectrode array with an embedded complementary metal oxide
semiconductor (CMOS) instrumentation amplifier suitable for sensing surfaces of biological …
semiconductor (CMOS) instrumentation amplifier suitable for sensing surfaces of biological …
NEMS switches for ultra-low-power digital logic: Challenges and opportunities
JL Munoz-Gamarra, C Poulain… - 2016 IEEE 16th …, 2016 - ieeexplore.ieee.org
A renewed interest in mechanical computing has emerged in Microelectronics in the last
years as a solution to the increasing static power density of CMOS technologies as they are …
years as a solution to the increasing static power density of CMOS technologies as they are …
[HTML][HTML] High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer
In this paper, a seesaw torsional relay monolithically integrated in a standard 0.35 μm
complementary metal oxide semiconductor (CMOS) technology is presented. The seesaw …
complementary metal oxide semiconductor (CMOS) technology is presented. The seesaw …