Hetergenous integration and electro-optic modulation of III-nitride photonics on a silicon photonic platform
M Soltani, T Kazior - US Patent 11,754,865, 2023 - Google Patents
(57) ABSTRACT A photonic integrated circuit comprises a silicon nitride waveguide, an
electro-optic modulator formed of a III-nitride waveguide structure disposed on the silicon …
electro-optic modulator formed of a III-nitride waveguide structure disposed on the silicon …