Nowadays, wafer fabrication in semiconductor manufacturing is highly dependent on cluster
tools. A cluster tool is equipped with several process modules (PMs) and a wafer handling …

With wafer residency time constraints, it is crucial to schedule a cluster tool in semiconductor
fabrication such that the wafer sojourn time in a processing module is in a given range …

The modeling and analysis of a flexible manufacturing system (FMS) cell using Petri nets is
presented. In order to illustrate how a Petri net with desirable properties can be constructed …

In operating a multi-cluster tool, it needs to coordinate the activities of multiple robots. Thus,
it is very challenging to schedule it. This paper conducts a study on one-wafer cyclic …

In the context of automated manufacturing systems (AMS), Petri nets are widely adopted to
solve the modeling, analysis, and control problems. So far, nearly all known approaches to …

Strict minimal siphons (SMS) play an important role in the development of deadlock control
policies for flexible manufacturing systems (FMS). For a class of Petri nets called Systems of …

Petri nets (PNs) have recently emerged as a promising approach for modelling flexible and
automated manufacturing systems. PNs are a graphical and mathematical modelling …

A theory that synthesizes Petri nets for modeling flexible manufacturing systems is
presented. The theory adopts a bottom-up or modular-composition approach to construct net …

An automated manufacturing system (AMS) contains a number of versatile machines (or
workstations), buffers, and an automated material handling system (MHS). The MHS can be …

The development of theoretical-based methods for the assessment of multi-agent systems
properties is of critical importance. This work is a preliminary investigation on methodologies …