Anti-reflection layer for back-illuminated sensor

M Muramatsu, H Suzuki, Y Yoneta, S Otsuka… - US Patent …, 2017 - Google Patents
An image sensor for short-wavelength light includes a semiconductor membrane, circuit
elements formed on one surface of the semiconductor membrane, and a pure boron layer on …

Low-noise sensor and an inspection system using a low-noise sensor

DL Brown, Y Chuang, J Fielden - US Patent 9,347,890, 2016 - Google Patents
(57) ABSTRACT A method of inspecting a sample at high speed includes directing and
focusing radiation onto a sample, and receiving radiation from the sample and directing …

Anti-Reflective Coating For Sensors Suitable For High Throughput Inspection Systems

DL Brown - US Patent App. 12/476,190, 2010 - Google Patents
0001 1. Field of the Invention 0002 The present invention relates to an anti-reflective coating
(ARC), and in particular to an ARC for sensors in high throughput inspection systems. 0003 …

Image sensor, an inspection system and a method of inspecting an article

YHA Chuang, J Zhang, J Fielden - US Patent 9,410,901, 2016 - Google Patents
(57) ABSTRACT A high sensitivity image sensor comprises an epitaxial layer of silicon that
is intrinsic or lightly p doped (Such as a doping level less than about 10 cm). CMOS or CCD …

Backlight control using light sensors with infrared suppression

A Kalnitsky, D Zheng, J Jones, X Lin, G Cestra… - US Patent …, 2013 - Google Patents
US8456410B2 - Backlight control using light sensors with infrared suppression - Google
Patents US8456410B2 - Backlight control using light sensors with infrared suppression …

Anti-reflection layer for back-illuminated sensor

M Muramatsu, H Suzuki, Y Yoneta, S Otsuka… - US Patent …, 2019 - Google Patents
An image sensor for short-wavelength light includes a semiconductor membrane, circuit
elements formed on one surface of the semiconductor membrane, and a pure boron layer on …

Radiation sensor with photodiodes being integrated on a semiconductor substrate and corresponding integration process

ME Castagna, S Leonardi, S Abbisso… - US Patent App. 12 …, 2010 - Google Patents
An embodiment relates to a sensor integrated on a semicon ductor Substrate and
comprising at least one first and second photodiode including at least one first and one …

Sensor comprising at least a vertical double junction photodiode, being integrated on a semiconductor substrate and corresponding integration process

S Leonardi, ME Castagna, A Muscara - US Patent App. 12/649,248, 2010 - Google Patents
An embodiment relates to a sensor being integrated on a semiconductor substrate and
comprising at least a vertical double-junction photodiode, in turn comprising at least one first …

Back-illuminated sensor and a method of manufacturing a sensor

YHA Chuang, JH Chern, J Fielden, J Zhang… - US Patent …, 2021 - Google Patents
An image sensor utilizes a pure boron layer and a second epitaxial layer having ap-type
dopant concentration gradient to enhance sensing DUV, VUV or EUV radiation. Sensing …

Sensor with electrically controllable aperture for inspection and metrology systems

YHA Chuang, J Fielden, DL Brown, J Zhang… - US Patent …, 2019 - Google Patents
Pixel aperture size adjustment in a linear sensor is achieved by applying more negative
control voltages to central regions of the pixel's resistive control gate, and applying more …