Using block copolymers as infiltration sites for development of future nanoelectronic devices: Achievements, barriers, and opportunities

C Cummins, MA Morris - Microelectronic Engineering, 2018 - Elsevier
Creating inorganic nanostructures for development of nanoelectronic device components is
a highly active research area. The ability for manipulation of the chemistry of materials, as …

Sub-10 nm scale nanostructures in self-organized linear di-and triblock copolymers and miktoarm star copolymers consisting of maltoheptaose and polystyrene

I Otsuka, Y Zhang, T Isono, C Rochas, T Kakuchi… - …, 2015 - ACS Publications
The present paper describes the sub-10 nm scale self-assembly of AB-type diblock, ABA-
type triblock, and A2B-type miktoarm star copolymers consisting of maltoheptaose (MH: A …

Perpendicularly oriented sub-10-nm block copolymer lamellae by atmospheric thermal annealing for one minute

T Seshimo, R Maeda, R Odashima, Y Takenaka… - Scientific reports, 2016 - nature.com
The directed self-assembly (DSA) of block co-polymers (BCPs) can realize next-generation
lithography for semiconductors and a variety of soft materials. It is imperative to …

Dry-etching processes for high-aspect-ratio features with sub-10 nm resolution high-χ block copolymers

G Pound-Lana, P Bézard, C Petit-Etienne… - … Applied Materials & …, 2021 - ACS Publications
Directed self-assembly of block copolymers (BCP) is a very attractive technique for the
realization of functional nanostructures at high resolution. In this work, we developed full dry …

Self-assembled structures of giant surfactants exhibit a remarkable sensitivity on chemical compositions and topologies for tailoring sub-10 nm nanostructures

K Yue, C Liu, M Huang, J Huang, Z Zhou, K Wu… - …, 2017 - ACS Publications
We report a remarkable sensitivity of self-assembled structures of giant surfactants on their
chemical compositions and molecular topology, which facilitate the engineering of various …

Combining Graphoepitaxy and Electric Fields toward Uniaxial Alignment of Solvent-Annealed Polystyrene–b–Poly(dimethylsiloxane) Block Copolymers

CC Kathrein, W Bai, JA Currivan-Incorvia… - Chemistry of …, 2015 - ACS Publications
We report a combined directing effect of the simultaneously applied graphoepitaxy and
electric field on the self-assembly of cylinder forming polystyrene-b-poly (dimethylsiloxane) …

Solvothermal Vapor Annealing of Lamellar Poly(styrene)-block-poly(d,l-lactide) Block Copolymer Thin Films for Directed Self-Assembly Application

C Cummins, P Mokarian-Tabari… - … applied materials & …, 2016 - ACS Publications
Solvothermal vapor annealing (STVA) was employed to induce microphase separation in a
lamellar forming block copolymer (BCP) thin film containing a readily degradable block …

Technological strategies for self-assembly of PS-b-PDMS in cylindrical sub-10 nm nanostructures for lithographic applications

TJ Giammaria, M Laus, M Perego - Advances in Physics: X, 2018 - Taylor & Francis
The continuous demand for small portable electronics is pushing the semiconductor industry
to develop novel lithographic methods to fabricate the elementary structures for …

Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers

X Chevalier, C Gomes Correia… - … Applied Materials & …, 2021 - ACS Publications
The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful method for the
manufacture of high-resolution features. Critical issues remain to be addressed for …

Rapid self-assembly and sequential infiltration synthesis of high χ fluorine-containing block copolymers

C Cummins, D Mantione, F Cruciani, G Pino… - …, 2020 - ACS Publications
We leverage the attractive properties of a high χ–low N BCP, ie, poly (styrene)-block-poly (2-
fluoroethylmethyl acrylate)(PS-b-P2FEMA), and illustrate its utility for next-generation …