Angle measurement is an essential component of precision measurement and serves as a
crucial prerequisite for high-end manufacturing. It guides the implementation of precision …

An absolute-type four-degree-of-freedom (four-DOF) grating encoder that can
simultaneously measure the three-axis pose (θx, θy, θz) and one-axis out-of-plane position …

Grating interferometers highly valued for high resolution, straightforward benchmark, and
insensitivity to environmental disturbances have become one of the most mainstream …

Here, we report an ultracompact angular displacement sensor based on the Talbot effect of
optical microgratings. Periodic Talbot interference patterns were obtained behind an upper …

Current real-time direction judgment systems are inaccurate and insensitive, as well as
limited by the sampling rate of analog-to-digital converters. To address this problem, we …

With the proliferation of diverse laser equipment, the optical environment in which highly
sensitive optical systems operate has become harsh and intricate. Mitigating laser jamming …

Optical path length (OPL) noise resulting from stray light significantly constrains
interferometry displacement measurements in the low-frequency band. This paper presents …

Absolute testing for metrology has always been one of the important development directions
of precision measurement. The mask with binary code is an important structure for forming …

Most multi-axis laser interferometers require accurate installation of the lasers and detectors
since the position and orientation installation errors of lasers and detectors bring …

Absolute measurement has consistently been the primary focus in the development of
precision linear and angular displacement measurements. The scheme design of binary …