Metrology for the next generation of semiconductor devices
NG Orji, M Badaroglu, BM Barnes, C Beitia… - Nature …, 2018 - nature.com
The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …
complex in shape and contain ever more types of materials. The ultimate sizes and …
Optical wafer defect inspection at the 10 nm technology node and beyond
The growing demand for electronic devices, smart devices, and the Internet of Things
constitutes the primary driving force for marching down the path of decreased critical …
constitutes the primary driving force for marching down the path of decreased critical …
Raman fingerprints of graphene produced by anodic electrochemical exfoliation
Electrochemical exfoliation is one of the most promising methods for scalable production of
graphene. However, limited understanding of its Raman spectrum as well as lack of …
graphene. However, limited understanding of its Raman spectrum as well as lack of …
Determination of the spin Hall effect and the spin diffusion length of Pt from self-consistent fitting of damping enhancement and inverse spin-orbit torque …
Understanding the evolution of spin-orbit torque (SOT) with increasing heavy-metal
thickness in ferromagnet/normal metal (FM/NM) bilayers is critical for the development of …
thickness in ferromagnet/normal metal (FM/NM) bilayers is critical for the development of …
Scanning acoustic microscopy (SAM): A robust method for defect detection during the manufacturing process of ultrasound probes for medical imaging
F Bertocci, A Grandoni, T Djuric-Rissner - Sensors, 2019 - mdpi.com
The main aim of this paper is to provide the feasibility of non-destructive testing (NDT)
method, such as scanning acoustic microscopy (SAM), for damage detection in ultrasound …
method, such as scanning acoustic microscopy (SAM), for damage detection in ultrasound …
Development of highly dense material-specific fluorophore labeling method on silicon-based semiconductor materials for three-dimensional multicolor super …
U Jeong, D Jeong, S Go, H Park, G Kim… - Chemistry of …, 2023 - ACS Publications
The recent development of super-resolution fluorescence microscopy (SRM) has drastically
improved the resolution of light microscopy to the order of tens of nanometers. However, the …
improved the resolution of light microscopy to the order of tens of nanometers. However, the …
Hand gestures classification using electrical impedance tomography images
Human–computer communication using hand gestures has always been difficult. More than
half a century ago, people used differentways of interactionwith computers from the early …
half a century ago, people used differentways of interactionwith computers from the early …
Super-resolution fluorescence imaging for semiconductor nanoscale metrology and inspection
The increase in the number and complexity of process levels in semiconductor production
has driven the need for the development of new measurement methods that can evaluate …
has driven the need for the development of new measurement methods that can evaluate …
[PDF][PDF] 集成电路制造在线光学测量检测技术: 现状, 挑战与发展趋势
陈修国， 王才， 杨天娟， 刘佳敏， 罗成峰… - Laser & Optoelectronics …, 2022 - researching.cn
摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …
High-throughput techniques for measuring the spin Hall effect
The spin Hall effect in heavy-metal thin films is routinely used to convert charge currents into
transverse spin currents and can be used to exert torque on adjacent ferromagnets …
transverse spin currents and can be used to exert torque on adjacent ferromagnets …