A review of micro-contact physics, materials, and failure mechanisms in direct-contact RF MEMS switches

A Basu, GG Adams, NE McGruer - Journal of Micromechanics …, 2016 - iopscience.iop.org
Direct contact, ohmic MEMS switches for RF applications have several advantages over
other conventional switching devices. Advantages include lower insertion loss, higher …

Revolutionizing wireless communication: A review perspective on design and optimization of RF MEMS switches

JJ Percy, S Kanthamani - Microelectronics Journal, 2023 - Elsevier
Abstract Micro Electro Mechanical System (MEMS) technology revolutionized electronics by
enabling miniaturization and integration of components like sensors, actuators, & switches …

Design and simulation of capacitive MEMS switch for Ka band application

V Bhatia, S Kaur, K Sharma, P Rattan… - Wireless …, 2021 - Wiley Online Library
In this paper, RF MEMS switch with capacitive contact is designed and analyzed for Ka band
application. A fixed‐fixed beam/meander configuration has been used to design the switch …

On shear-dependent vibration of nano frames

HM Numanoğlu, Ö Civalek - International Journal of Engineering Science, 2024 - Elsevier
In this study, the effect of shear deformation on the atomic size-dependent free vibration of
nanoframes is investigated. The equations of motion of axial and bending vibrations are …

Design and performance analysis of low pull-in voltage of dimple type capacitive RF MEMS shunt switch for Ka-band

KG Sravani, D Prathyusha, KS Rao, PA Kumar… - IEEE …, 2019 - ieeexplore.ieee.org
This paper deals with the study of dimple type RF MEMS capacitive shunt switch using
different meandering techniques for high isolation and low actuation voltage. The novelty of …

[HTML][HTML] Recent advances in flexible RF MEMS

Y Shi, Z Shen - Micromachines, 2022 - mdpi.com
Microelectromechanical systems (MEMS) that are based on flexible substrates are widely
used in flexible, reconfigurable radio frequency (RF) systems, such as RF MEMS switches …

Comprehensive review of low pull-in voltage RF NEMS switches

R Chaudhary, PR Mudimela - Microsystem Technologies, 2023 - Springer
The present study focuses on state-of-the-art of the demand, operating principles, design
parameters, different materials for beam and dielectric, already existing technologies and …

[HTML][HTML] Flexible radio-frequency micro electro-mechanical switch towards the applications of satellite communications

Y Shi, C Zhou, Z Cao, Y He, J Guo, C Li, Q Wu… - npj Flexible …, 2022 - nature.com
This paper presents a flexible radio-frequency microelectromechanical system (RF MEMS)
switch integrated on cyclo-olefin polymer (COP) substrate using a modified surface MEMS …

Mechanical modeling, numerical investigation and design of cantilever beam for low pull-in MEMS switch

PV Kasambe, KS Bhole, NR Raykar, AD Oza… - International Journal on …, 2022 - Springer
The pull-in voltage of an electrostatically actuated cantilever-based series type MEMS switch
suitable as a switching device in several applications can be lowered by reducing its …

A systematic review of reliability issues in RF-MEMS switches

MM Saleem, H Nawaz - Micro and Nanosystems, 2019 - ingentaconnect.com
The main challenge in the commercialization of the RF-MEMS switches is their reliability,
related to both the electrical and mechanical domains. The development of test standards …