Metrology for the next generation of semiconductor devices
NG Orji, M Badaroglu, BM Barnes, C Beitia… - Nature …, 2018 - nature.com
The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …
complex in shape and contain ever more types of materials. The ultimate sizes and …
Automated and autonomous experiments in electron and scanning probe microscopy
Machine learning and artificial intelligence (ML/AI) are rapidly becoming an indispensable
part of physics research, with domain applications ranging from theory and materials …
part of physics research, with domain applications ranging from theory and materials …
Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues
YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012 - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …
A novel hybrid actuation mechanism based XY nanopositioning stage with totally decoupled kinematics
This paper reports the design, analysis and testing of a parallel two degree-of-freedom piezo-
actuated compliant stage for XY nanopositioning by introducing an innovative hybrid …
actuated compliant stage for XY nanopositioning by introducing an innovative hybrid …
Design rules for dense and rapid Lissajous scanning
J Wang, G Zhang, Z You - Microsystems & nanoengineering, 2020 - nature.com
Lissajous microscanners are very popular in compact laser-scanning applications, such as
solid-state light detection and ranging (LIDAR), owing to their high-quality factor and low …
solid-state light detection and ranging (LIDAR), owing to their high-quality factor and low …
Frequency selection rule for high definition and high frame rate Lissajous scanning
Lissajous microscanners are very attractive in compact laser scanning applications such as
endomicroscopy or pro-projection display owing to high mechanical stability and low …
endomicroscopy or pro-projection display owing to high mechanical stability and low …
High-speed electrochemical imaging
The design, development, and application of high-speed scanning electrochemical probe
microscopy is reported. The approach allows the acquisition of a series of high-resolution …
microscopy is reported. The approach allows the acquisition of a series of high-resolution …
Modeling and identification of asymmetric Bouc–Wen hysteresis for piezoelectric actuator via a novel differential evolution algorithm
G Wang, G Chen, F Bai - Sensors and Actuators A: Physical, 2015 - Elsevier
A novel modified Bouc–Wen (MBW) model is presented in this paper to describe the
asymmetric hysteresis of piezoelectric actuator, and the parameter identification method is …
asymmetric hysteresis of piezoelectric actuator, and the parameter identification method is …
Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation
Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become
very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical …
very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical …
Frontiers in nanoscale electrochemical imaging: faster, multifunctional, and ultrasensitive
A wide range of interfacial physicochemical processes, from electrochemistry to the
functioning of living cells, involve spatially localized chemical fluxes that are associated with …
functioning of living cells, involve spatially localized chemical fluxes that are associated with …