[HTML][HTML] Fabrication and characterization of a CMOS-MEMS humidity sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …
MEMS capacitive humidity sensor with plate array structure using polyimide sensing layer
PR Vijapur, SR Karbari… - … Conference on Circuits …, 2017 - ieeexplore.ieee.org
The structure of MEMS Humidity Sensor is developed with silicon as substrate material. The
proposed humidity sensor works on the principle of change in dielectric constant of the …
proposed humidity sensor works on the principle of change in dielectric constant of the …