Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review
T Namazu - IEEJ Transactions on Electrical and Electronic …, 2023 - Wiley Online Library
By virtue of a great progress of semiconductor fabrication technologies, micro electro‐
mechanical systems (MEMS) have been developed for a wide variety of industries. For …
mechanical systems (MEMS) have been developed for a wide variety of industries. For …