Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System

X Cheng, S Xu, Y Liu, Y Cao, H Xie, J Ye - Micromachines, 2023 - mdpi.com
Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly
important role in active structured light systems. However, the initial phase error of the …

[引用][C] Development of an Optoelectronic Integrated Sensor for a MEMS Mirror-Based Active Structured Light System. Micromachines 2023, 14, 561

X Cheng, S Xu, Y Liu, Y Cao, H Xie, J Ye - 2023 - europepmc.org
Micro-electro-mechanical system (MEMS) scanning micromirrors are playing an increasingly
important role in active structured light systems. However, the initial phase error of the …